Large Aperture Piezo Stage

PXY 16

  • Motion in X and Y axis - up to 20 µm
  • High resonant frequency
  • High stiffness
  • Minimum Z motion
  • Center Aperture
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PXY 16 Description

The 2-axis PXY 16 was developed especially for optical scanning applications. It is optimized for a high resonant frequency and a high stiffness in all axes.

Originally designed for mounting optical lenses, this piezo XY positioner delivers fast and precise movement of mechanical parts. 

The internal preload and the design (without mechanical transmission) make this actuator well suited for high frequency applications – up to the kilohertz range.

Technical Data

Part #S-644-00S-644-06
AxisX, YX, Y
Motion in Open-Loop (±10%)*μm1616
Motion in Closed-Loop (±0,2%)*μm12
Resolution Open-Loop**nm0.040.04
Resolution Closed-Loop**nm1.0
Dimensions (L x W x H)mm98 x 98 x 20104 x104 x 250
*Typical value measured with a NV 40/3 amplifier (closed loop: 30V300 CLE amplifier). **The resolution is only limited by the noise of the power amplifier and metrology.

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