XYZ-Positioner (Nanopositioner) TRITOR® Series
TRITOR® Series Characteristics
detail of TRITOR®
- highly compact design resulting in superior performance
- integrated feedback sensor system option
- accurate parallel motion through parallelogram design
- high reliability due to solid state hinges
- motion without mechanical play
- high resolution in nm and sub-nm range
- motion up to 400 µm
- precision pin holes
Product overview series TRITOR®
microTRITOR®
microTRITOR® - 3D nanopositioners
- Motion range XYZ: up to 9 µm
- Size: 15 x 15 x 15 mm/without central opening
- Applications: probe scanning in cryogenic application
Smallest 3D piezo stage available!
miniTRITOR®
miniTRITOR® - 3D nanopositioners
- Motion range XYZ: up to 38 µm
- Size: 19x19x16mm/without central opening
- Applications: scanning, semiconductor, micro machining
Compact size 3D piezo stage
TRITOR® 38
TRITOR® 38 - 3D Nanopositioners
- Motion range XYZ: up to 38 µm
- Size: 25 x 25 x 27 mm/Option: SG feedback
- Application: scanning, fiber alignment, assambling
Compact size 3D piezo stage
TRITOR® 50
TRITOR® 50 - XYZ Multiaxes Positioning Stages
- Motion range XYZ: up to 50 µm
- Size: 55 x 42 x 34.5 mm/with integrated feedback
- Applications: metrology, micro machining
High resolution 3D piezo stage
TRITOR® 100
TRITOR® 100 - 3D Positioning Element
- Motion range XYZ: up to 100 µm
- Size: 40 x 40 x 34 mm / Option: feedback
- Applications: metrology, micro machining, alignment
Universal 3D nano system
TRITOR® 101
TRITOR® 101 - 3D Multiaxes Positioning Stages
- Motion range XYZ: up to 100 µm
- Size: 68 x 68 x 30 mm / Option: feedback
- Applications: microscopy, beam alignment
3D nano system with ø30mm center hole
TRITOR® 102
TRITOR® 102 - XYZ Nanopositioners
- Motion range XYZ: up to 100 µm
- Size: 80 x 80 x 30 mm / Option: feedback
- Applications: microscopy, beam alignment
3D nano system with ø40 mm center hole
TRITOR® 320
TRITOR® 320 - 3D Multiaxes Positioning Stages
- Motion range XY: 50 µm Z: up to 320 µm
- Size: 320 x 320 x 55 mm / option: feedback
- Applications: wafer & lithography
3D high load stage, opening: 150 x 150 mm
TRITOR® 400
TRITOR® 400 - 3D nanopositioning systems
- Motion range XYZ: up to 400 µm
- Size: 116 x 106.5 x 40 mm / Option: feedback
- Applications: optics, probe alignment
3D positioning element, opening: 12.5 (19) mm* diameter
*depending on type of feedback sensor
Summary TRITOR® series
design:
The unique TRITOR® nanopositioners are extremely compact but offer motions of up to 400 µm in all three axes. Parallel motion is achieved without mechanical play due to the mechanical design. As an option, integrated position control systems for overcoming the effect of hysteresis are available.
TRITOR® nanopositioners can be easily combined with other mechanical positioning systems. They are well suited for various applications reaching from optical research to OEM systems.
mounting instructions:
TRITOR® elements consist of actuators integrated in a housing with an internal lever transmission. Since the lever mechanism works in both directions, forces between the housing and top plate need to be avoided, as they could damage the stage.
The multi-axes positioning stage is attached by using two diagonal holes. Components can be mounted on the top plate by using two diagonal tap holes and can be accurately located by using the precision pin holes.
Series TRITOR® with following Systems:
| - motion 9 µm, smallest XYZ-positioner |
| - motion 38 µm XYZ, scanning, microassembly |
| - motion 38 µm XYZ, scanning, microassembly |
| - motion 50 µm XYZ, metrology, microassembly |
| - motion 100 µm, metrology, microassembly, positioning |
| - motion 100 µm, microskopy, laser technology |
| - motion XY:40 µm; Z:320 µm, wafer & lithographie |
| - motion 400 µm, sample positioning |