- Travel range 120/100 µm (open loop/closed loop)
- Sub-nm resolution
- Excellent guidance accuracy
- High Z-axis stiffness
- 12.5 mm central aperture
- Compact design
The nanoSXY 120 combines the high accuracy and speed of a piezo positioning system with a special actuating design for long travel motion. The stage offers a compact design with a height of only 20 mm, outside dimensions of only 60 x 60 mm, and a free center space of 12.5 mm.
The ultra flat design of the stage and the easy ability to combine it with an XY scanning system, makes the system especially useful for a wide variety of applications.
Based on the unique bi-directional actuating nanoX design, the nanoSXY 120 can move high load masses with a resolution of 0.25 nm. The design also guarantees excellent guidance accuracy without parasitic motion and improves the settling time actively. The stage can be equipped with a high resolution feedback system for closed loop control.
Fields of application include high resolution metrology, X and XY scanning, and dynamic positioning. The stages are also available in cryogenic and vacuum versions.
|UNIT||nanoSXY 120||nanoSXY 120 CAP|
|Axis||X, Y||X, Y|
|Motion in Open Loop (±10%)*||μm||120||–|
|Motion in Closed Loop (±0,2%)*||μm||–||100|
|Resolution Open Loop**||nm||0.24||–|
|Resolution Closed Loop**||nm||–||1.0|
|Dimensions (L x W x H)||mm||60 x 60 x 20||60 x 87 x 30|