Optical stages often require an open aperture for passing light through. The PENTOR translation and tilting system was developed with a 17 mm free center hole for such applications. It offers motion in X, Y and Z directions of 100 µm, and a tilt of ±2 mrad on two orthogonal axes.
Flexure hinges for the three translation axes guarantee the highest degree of parallelism over the travel range of this stage. Each axis has a integrated mechanical preload, making the 5-axis piezo positioner PENTOR, very well suited for dynamic applications. The tilting is designed for plus-minus tilting.
The construction is temperature compensated so that changes in the surrounding temperature do not affect the tilting angle. The mirror mounts are preloaded, and are characterized by high stiffness and resonant frequency – and dynamic operation is possible.
The primary components constructed with solid state flexure hinges are made from stainless steel. The bottom and top plates are made from black anodized aluminum.
As an option, the 5-axis PENTOR can be outfitted with an integrated strain gauge measurement system.
|Axis||X, Y, Z, ØX, ØY||X, Y, Z, ØX, ØY|
|Motion in X, Y, Z Open Loop (±10%)*||μm||100||100|
|Motion in X, Y, Z Closed Loop (±0.2%)*||μm||–||80|
|Resolution in Open Loop**||nm||0.2||0.2|
|Resolution in Closed Loop**||nm||–||2|
|Dimensions (L x W x H)||mm||69 x 68 x 40||69 x 68 x 40|