Positioning drives z-axis PZ 8 D12
- Accurate parallel motion by parallelogram design
- 3 kHz resonant frequency
- Version with positioning sensor available
- Motion without mechanical play because of solid state hinges
- Scanning systems
- STM and AFM microscopy
- Wafer handling
- Electronics & robotics
The positioning drives PZ 8 D12 and 20 D12 have been developed as additional elements for series PXY D12 and are a special modification of the PZ translation stages. Travel in the z-direction of 8 µm and 20 µm, respectively, is provided.
These piezo stages have a basic, frugal design without a bottom or base plate and are very easy to combine with other systems. They can be equipped with positioning feedback sensors for closed loop control. Vacuum and cryogenic versions are available as well.