Z-Axis Translation Stages Series PZ

characteristics series PZ

  • accurate parallel motion on z-axis
  • motion free of mechanical play because of solid state hinges
  • easily combined with other piezoelectrical systems
  • precision pin holes for accurate adjustment
  • motion range 8 microns up to 400 microns
  • resonant frequency up to 3 kHz
  • single step resolution: 0.02 nm
  • versions with capacitive positioning sensors (CAP)

Product Overview PZ series

PZ 8 D12 SG

 

PZ 8 D12 - Positioning-Scan-Drive

  • Travel range: up to 8 µm in z direction 
  • Size: 21x26x15 mm³
  • Res. freq.: 3 kHz
  • Mountable on top of PXY D12

 

Scan drive without top/bottom plate

PZ 10

 

PZ 10 – Z Positioning Element

  • Travel range: up to 10 µm 
  • Size: 36.5x36.5x15 mm³

 

High parallel z-axis motion


PZ 16 CAP

 

PZ 16 CAP - Z Translation Stages

  • Travel range: up to 22 µm; option: sensor/vacuum 
  • Size: 45x45x30 mm3;

 

Z-axis linear stage with top/bottom plate

PZ 20 D12

 

PZ 20 D12 - Positioning-Scan-Drive

  • Travel range: 20 µm in z direction 
  • Size: 21x26x15 mm3
  • Res. freq.: 1.8 kHz 
  • Mountable on top of PXY D12

 

Series scan drive without top/bottom plate


PZ 38

 

PZ 38 - Z-Axis Positioner

  • Travel range: up to 38 µm; option: sensor/vacuum 
  • Size: 25x25 and 40x40 mm²; 

 

Z-axis linear stage with top/bottom plate

PZ 100

 

PZ 100 - Z-Axis Piezo Stages

 

  • Travel range: up to 100 µm 
  • Size: 40x40 mm2
  • Option: sensor/vacuum 

 

Z-axis linear stage with top/bottom plate


PZ 200 OEM

 

PZ 200 OEM - Positioning Linear Drive

  • Travel range: up to 200 µm 
  • Dimensions: 50x17 mm²
  • Option: sensor 

 

Z-motion linear actuator for OEM use

PZ 250 SG

 

PZ 250 SG - Elevator Z-Stage Series

  • Travel range: up to 250/350 µm open/closed loop
  • S-axis linear stage for focus leveling

 

Footprint for microscope integration


PZ 250 CAP WL

 

PZ 250 CAP WL - Wafer Positioner

  • Travel range: up to 350/250 µm open/closed loop
  • Precise positioning of wafers of all kind with diameters of up to 12”

 

High–precision wafer positioning in inspection systems

PZ 300 AP

 

PZ 300 AP – Z-Axis Piezo Stages For Microscopes

  • Travel range: up to 300 µm; sensor feed back 
  • For Zeiss, Olympus, Nikon, Leica e.g. 
  • Free aperture for probes & Multiwell plates 

Microscope stage with top/bottom plate


PZ 400

 

PZ 400 – Z-Axis Translation Stages

  • Travel range: up to 400 µm
  • Size: 48x52 mm2
  • Option: sensor 

 

Z-axis linear stage with top/bottom plate

PZ 400 OEM

 

PZ 400 OEM - Positioning Linear Drive

  • Travel range: up to 400 µm
  • Dimensions: 66x24 mm2
  • Option: sensor

 

Z-motion linear actuator for OEM use


PZ 700 SI

PZ 700 SI

PZ 700 SI

 

PZ 700 SI - Positioning Linear Drive

  • Travel range: up to 700 µm
  • Size: 120x112x28 mm

 

Z-axis linear stage with a generous travel range


summary PZ series

The z-axis translation stages or piezo stages series PZ are especially made for high-resolution and high-precision movement in z-axis. These units offer a travel range from 8 microns up to 400 microns with sub-nanometer accuracy in z-direction. Optical components, tools and similar systems can be adapted at these flexure hinge systems and they can be moved with high dynamic range. The stages series PZ comes with a top and bottom plate in "stage" design. The series PZ OEM and PZ D12 are especially made for easy integration into customers setups, and therefore without top and bottom plate.

The z-axis positioners (series PZ) are ideally suited for nm-precise positioning of optic components such as mirrors and laser diodes, for adjustment and mounting in semi-conductor technologies and electronics, for applications in measurement technologies and quality assurance, as well as for microbiology.
As mentioned above, these elements are available in OEM version and special vacuum, and low temperature configurations.
To achieve very accurate repeatability or to avoid effects like drift and hysteresis, optionally, they can be equipped with strain gauge or capacitive position sensors - depending on the system configuration.

If you wish to receive further information about this product please use our contact form or send an email to: sales(at)piezojena.com

 

 


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