Characteristics:

• Motion without any mechanical play
• Motion up to 400 micrometers
• Integrated lever transmission
• nm resolution
• Easy adjustment
• Integrated pre-load
• For dynamic applications
• High resonant frequency
• Combinable with other systems
• Vacuum compatible

Application Examples:

• Fiber positioning, laser optics
• Scanning systems
• Micromanipulation

Due to the nature of the solid state flexure and parallelogram construction, these nanopositioning stages can travel without any mechanical play in the x and z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

The PZ series piezo stages can be easily combined with XY-elements of the XYZ nano elements or with tilting piezoelectric modules of the PSH series to give positioning with all degrees of freedom. Dynamic work is possible.

The nanopositioning element PZ 400 OEM series can be equipped with measurement systems (strain gauge) that compensate for hysteresis.