Characteristics:

• Accurate parallel motion by parallelogram design
• 3 kHz resonant frequency
• Version with positioning sensor available
• Motion without mechanical play because of solid state hinges
  
  

Applications:

• Scanning systems
• STM and AFM microscopy
• Wafer handling
• Electronics & robotics

The PZ 8 D12 and 20 D12 have been developed as additional elements for the piezo translation stage PXY D12 series and are a special modification of the PZ translation stages. Travel in the z-direction of 8 µm and 20 µm is provided.

These nanopositioning elements have a basic, frugal design without a bottom or base plate and are very easy to combine with other systems. The PZ 8 D12 and the PZ 20 D 12 can be equipped with positioning feedback sensors for closed loop control. Optionally, vacuum and cryogenic versions are also available.

• What means closed loop operation?