ScanXY 40 - 2D scan and positioning stage

Product highlights:
• 2D motion in XY
• 40 µm travel range per axis
• motion without mechanical play
• 1.4 kHz unloaded resonant frequency
• lowest settling time
• 15 mm central opening

Applications:
• mirror and lens positioning
• 2D-scanning systems
• beam alignment
• semiconductor
• micro manipulation

Concept:
The Scan XY40 piezoelectric actuating stage offers a travel range of 40 microns per axis. The nano positioning piezo stage is mainly designed to fulfill requirements for 2D scanning applications. The superiorly performing scanning stage can offer a resonant frequency of more than 1.4kHz per axis. The Scan XY40 is ideally suited for nm-precise positioning of light weight optic components such as mirror prisms or laser diodes. The Scan XY40 can offer significant advantages when used in a variety of applications where speed and a low settling time play an important role. These applications include semiconductor technologies and electronics, and applications in measurement technologies and quality assurance as well as microbiology.

Specials:
The X- and Y-axis of the 2D piezo scanner can be controlled separately. The axes are positioned orthogonally to each other and the direction of motion is shown by small markings on the stage. The FEM optimized flexure hinge design provides the lowest settling time and superior trajectory accuracy. piezosystem jena piezo stage designs offer motion without mechanical play or mechanical wear. The optimized stage design offers the uniqe nanoX® drive principal. The bidirectional actuating system is characterized by active set and reset forces. Thus the essential features of these high speed positioners are the very high stiffness and natural resonant frequency.

Interfaces:
The Scan XY40 can be easily mounted by using the four mounting hole set up. For component assembling, the moving part offers 4 pieces and M2 threading holes with a 13x13 mm pattern in the center of the piezoelectric positioning stage.

Recommened Controller:
To use the available range of speed, dynamic and accuracy offered by the piezostage 2D ScanXY 40, we recommend the digital controller unit of the series d-Drive.

ScanXY 40

ScanXY 40
ScanXY 40

+1 (508) 634-6688U.S. Office

+49 (3641)-6688 0German Office

Please contact our technical staff for further assistance. Together with you we will find a solution for your needs.

e-mail address: info@piezojena.com

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