Piezo stage series PXY 38

characteristics:

• accurate parallel motion
• up to 38 µm motion range
• without mechanical play
• easily combined with other piezo electrical systems
• precison pin holes for accurate adjustment
• high dynamic range
  
  

application examples:

• fiber positioning
• 2D-scanning systems
• beam alignment
• semiconductor
• micro manipulation

Solid state hinges in parallelogram construction provide parallel motion without mechanical play in the x and y directions. These construction principles result in a very high resolution which far surpasses the resolution of mechanical and electromechanical positioning systems.

The piezo stage PXY 38 series can be easily mounted to other positioning systems and can be equipped with measurement devices (strain gauge) that overcome the effect of hysteresis.
Dynamic operation is possible and the PXY 38 piezo elements are very well suited for solving scanning problems.