X Piezo Stages: PU 90 – Adjusting Range of 90 µm

Characteristics:

  • High stability
  • High resolution in nm- and sub-nm range
  • Motion up to 90 µm
  • Motion without any mechanical play
  • Easy and universal adjustment
  • Integrated pre-load
  • Dynamic application
  • High resonant frequency
  • Combinable with other PU systems
  • Universal application for 1D, 2D, and 3D systems
  • Vacuum compatible version

Application Examples:

  • Fiber positioning, laser optics
  • Scanning systems
  • Micromanipulation
  • Wafer chuck handling


The PU translation stages consist of only one metallic part. They are characterized by an excellent mechanical stability. The x piezo stages can work dynamically.

The piezo actuators are manufactured with a special feature. By assembling of 3 piezo systems a 3D XYZ configuration can be created. All necessary threads are already installed in the flexure hinges stage body. We supply the screws and the distance plate with every single piezo element.

Three systems, mounted on a circle with 120° to each other, are ideally suited for wafer chuck movement. The high blocking forces and the compactness makes the PU series also ready for dynamical use under such high loads.

PU 90 Series

PU 90 with Feed Back Sensor

PU series - Example for XYZ assembling

Recommended Piezo Controller

  • 1-channel controller with compact design
  • Open and closed loop operation
  • Strain gage or capacitive sensor controller
  • RS 232 Interface (9-pol. D-Sub)
  • Display shows V or µm
  • Memory-function
  • Actuator exchanging without recalibration

+1 (508) 634-6688U.S. Office

+49 (3641)-6688 0German Office

Please contact our technical staff for further assistance. Together with you we will find a solution for your needs.

e-mail address: info@piezojena.com

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