X-Axis Piezo Positioning Stages
PU Series Characteristics:
- integrated preload
- high mechanical stability due to high stiffness
- OEM module with small dimensions
- accurate parallel motion from parallelogramm design
- 1-axis translation from 40 µm up to 100 µm
- optional with integrated measurement system (version SG or CAP)
- other materials possible
(nonmagnetic stainless steel, anodized aluminum, titanium) - vacuum and cryogenic temperature version
- block actuator without top/bottom plate
PX Series Characteristics:
- integrated preload
- OEM module with small dimensions
- X-axis translation from 38 µm to 400 µm (PX 38 - PX 400)
and 500 µm/1500 µm (PX 500/PX 1500) - optional with integrated measurement system (version SG or CAP)
- other materials possible
(nonmagnetic stainless steel, anodized aluminum, titanium) - vacuum and cryogenic temperature version
- Positioning stage with top/bottom plate (PX 38 - PX 400)
- Linear actuating piezo drive (PX 500 und PX 1500)
Overview X-Axis Piezo Positioning Stages
PU 100
PU 100 / PU 100 SG / PU 100 CAP
- Travel range: up to 100 µm
- Mountable horizontally and vertically
- Option: integrated measurement system
Block actuator without top/bottom plate
PX 100
PX 100 / PX 100 SG / PX 100 CAP
- Travel range: up to 100 µm
- Size: 40x40mm²
- Option: positioning sensor/vacuum
Positioning stage with top/bottom plate
PX 200
PX 200 / PX 200 SG / PX 200 CAP
- Travel range: up to 200 µm
- Size: 52 x 48 mm²
- Option: positioning sensor/vacuum
Positioning stage with top/bottom plate
PX 300
PX 300 / PX 300 SG / PX 300 CAP
- Travel range: up to 300 µm
- Size: 52x48mm²
- Option: positioning sensor/vacuum version
Positioning stage with top/bottom plate
PX 400
PX 400 / PX 400 SG / PX 400 CAP
- Travel range: up to 400 µm
- Size: 52 x 48 mm²
- Option: positioning sensor/vacuum version
Positioning stage with top/bottom plate
summary series PU and PX
The x-axis piezo positioning stage series consists of the stages series PU and the series PX.
Both series are ideally suited for nm-precise positioning of optic components such as mirrors and laser diodes, for adjustment and mounting in semiconductor technologies and electronics, for applications in measurement technologies and quality assurance, as well as for microbiology.
Key feature are the positioning of components within millisecond settling time and a long term positioning stability, in the case the actuator is equipped with a closed loop feedback sensor system.
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For more information on our X-Axis Piezo Positioning Stages, please contact our sales and technical support team via sales(at)piezojena.com or call +49 (3641) 66 88 0.