XYZ Piezo Positioning Stage TRITOR 50


  • Highly compact design
  • Motion up to 50 µm
  • Integrated feedback sensor
  • Accurate parallel motion by parallelogram design
  • Motion without mechanical play
  • High reliability and linearity due to solid state hinges
  • High resolution in nm and sub-nm range
  • Precision pin holes

With the release of the TRITOR 3D positioning stage series, piezosystem jena was the first company to offer compact 3D piezo nanopositioning stages worldwide. The XYZ piezo positioning stage TRITOR 50 CAP combines the advantages of a very compact size with the positioning accuracy of a capacitive regulated system. The positioning system offers motion of 50 µm in all three axes. The small dimensions of 52 x 35 x 42 mm³ and a parallel XYZ motion makes the TRITOR 50 one of the smallest 3D piezo stage available on the market. The unique design of the flexure guiding system allows for excellent usability with zero friction. Because of the high stiffness and excellent straightness of motion, the TRITOR series is suitable for high precision positioning in the nanometer range like fiber alignment, laser-technique, and any other type of high accurate micro positioning application.


Piezoelectric actuators can act much faster, and with a higher accuracy, than any motorized drive available. The resolutions are only limited by the signal noise of the control system. Therefore, these multiaxis systems are very suitable for positioning applications in fiber alignment, optics, wafer handling, medical equipment, etc. Dynamic scan applications are a typical utilization for the piezo elements of the TRITOR series. The simultaneous motion, available in XYZ directions, offers large freedom during use. All stages in the TRITOR series can be made with special materials for extraordinary applications such as vacuum or cryogenic applications.

All nanopositioning stages are constructed with a top and a bottom plate. Through holes are used for fixing the piezo stage which is important for all dynamic applications. On the top plate there are several pin holes and threaded holes for the mounting of external components. The XYZ positioning stages are built with reliable piezo stack actuators, with a flexible insulation that is well suited for a high dynamic burden.



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