Piezo Multi Layer Ceramic Actuators without Housing – Series N

N Series Characteristics

  Motion up to 123 µm
  Sub-nm resolution           
High stiffness up to 250 N/µm
Blocking force up to 3500 N
various top/end plates
opt.: vacuum/cryogenic version

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    Series N - Stack type actuators

    Series N - Stack type actuators


    Summary

    Design

    The piezo actuators actuators series N are made for industrial applications. They consist of a large number of contacted ceramic discs. The electrodes are arranged on both sides of the ceramic discs. They are specially shielded by a flexible insulation material which guarantees the highest possible dynamic performance under the toughest requirements. Based on their design, they are well suited for easy integration into specific customer systems. Special designs are made with a centrically drilled hole. They are called ring type actuators. Please see the R and RA piezo actuators chapter. They are mainly used for laser cavity alignment.

    Insulation

    The piezo ceramic is covered by special flexible polymer insulation. This insulation guarantees the highest performance for long term applications. The flexible polymer coating material gives the PZT actuators proven protection against various and harsh environments. The advantage of a flexible insulation versus brittle ceramic insulation is a longer lifetime. piezosystem jena has experimentally tested this advantage. Results show that piezo electric actuators have worked, and continue to work, under extreme conditions for over 20 years. The insulation is also suitable for use in cryogenic and vacuum environments. Additional thermal shrink tube insulation protects the cable connection point on the ceramic.

    Mounting

    It is rather important not to subject the actuator tip to non-axial forces during the manufacturing process and use. The PZT multilayer stacks are not preloaded. An external preload is applied when used in dynamic applications or in applications with high acceleration forces. The standard cable length is 100 mm. As an option, flat tungsten carbide or ball tip end plates are available. Please note, when using under cryogenic conditions (4 K), only 10% of the standard motion is available.

    Application

    The piezo actuators series N have been successfully working for more than 15 years in a vast number of applications in the fields of nano-metrology, semiconductor, material sciences and scanning applications.

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