Piezo Slit System PZS 4 (300 µm Slit)
- Driven by 1 piezo actuator
- Symmetrical motion of 2 slit edges
- Opening: up to 300 µm
- Nanometer resolution
- Vacuum compatible version
- Optional: measurement system
- Vacuum Systems
- Optical Switches
- Shutters and Scanners
Solid state flexure hinges were used to construct the piezo slit elements PZS 4 in order to ensure synchronization of the slit edges with respect to the center line.
To avoid hysteresis, creep, and temperature effects, the piezoelectric slit can be equipped with a strain gauge measurement system.
The piezo slit system with steel slit edges are also available. All elements are available in UHV compatible versions and with different body and slit edge materials (INVAR).