Piezo Slit System PZS 3 (1500 µm Slit)
- Symmetrical movement of 2 slit edges
- Opening up to 1500 µm
- Driven by only 1 piezo actuator
- Nanometer resolution
- Vacuum compatible version available
- Optional measurement system
- With steel slit edges available
- Vacuum Systems
- Optical Switches
- Shutters and Scanners
The piezo slit system constis of 2 slit edges, which are driven by 1 piezoelectric actuator. Solid state flexure hinges with a parallelogram design were used for the construction of this piezo slit element in order to ensure the synchronization of the slit edges with respect to the center line.
The piezo slit systems PZS are available in UHV compatible versions and with different body and slit edge materials (INVAR).