Piezo slit systems PZS 2 (60 micron slit)
- Symmetrical motion of 2 slit edges
- Opening: up to 60 µm
- Driven by one piezo actuator
- Nanometer resolution
- Vacuum compatible version
- Option: measurement system
- Elements with steel slit edges also available
- Vacuum Systems
- Optical Switches
- Shutters and Scanners
2 slit edges are driven by only one piezoelectric actuator. We recommend a strain gauge measurement system to avoid hysteresis, creep, and temperature effects. The positioning accuracy of the piezo slit systems with integrated measurement system is typically 0.1% or better.
The piezo slit elements PZS are available in UHV compatible versions and with different body and slit edge materials (INVAR).