Piezo Slit System PZS 1 (230 µm Slit)
- Symmetrical movement of 2 slit edges
- Driven by 1 piezo actuator
- Opening up to 230 µm
- Nanometer precise resolution
- Vacuum compatible version
- Option: measurement system
- Steel slit edges also available
- Vacuum Systems
- Optical Switches
- Shutters and Scanners
The 2 slit edges are driven by only 1 piezoelectric actuator. The piezoelectric slit system can be equipped with a strain gauge measurement system to avoid hysteresis, creep, and temperature effects. The positioning accuracy of the piezo element with integrated measurement system is typically 0.1% or better.
The piezo slit system PZS is available in UHV compatible version and with different body and slit edge materials (INVAR).