Shutter/Slit Systems

Piezo Slit System

Characteristics:

  • Symmetrical motion of 2 slit edges
  • Driven by only 1 piezo actuator
  • Opening up to 1500 µm (1.5 mm)
  • Nanometer precise resolution
  • Vacuum compatible version
  • Optional measurement system

Applications:

  • Optics
  • Spectroscopy
  • Vacuum Systems
  • Optical Switches
  • Shutters and Scanners

PZS 1 (230 Micrometer Slit) - Piezo Slit System
Symmetrical motion of 2 slit edges

  • Opening up to 230 µm
  • Nanometer resolution
  • Vacuum compatible version
  • Measurement system available

Shutter/Slit Systems

PZS4 Shutter / Slit System

Beam-Collimation / Beam Shaping

PZS 2 (60 Micrometer Slit) - Piezo Slit System
Symmetrical motion of two slit edges driven by only one piezo actuator

  • Opening up to 60 µm
  • Precise resolution in nanometer range
  • Vacuum compatible version
  • Measurement system available

PZS 3 (1500 Micrometer Slit) - Piezo Slit System
Symmetrical motion of 2 slit edges

  • Opening up to 1500 µm (1.5 mm)
  • Nanometer resolution
  • Vacuum compatible version
  • Measurement system available

PZS 4 (300 Micrometer Slit) - Precise Slit System
Symmetrical movement of 2 slit edges driven by one piezo actuator

  • Nanometer resolution
  • Opening up to 300 µm
  • Vacuum compatible version
  • Measurement system available

Two slit edges are driven by only one piezoelectric actuator. Solid state flexure hinges with a parallelogram design were used to construct the piezo slit systems in order to ensure the synchronization of the slit edges with respect to the center line. To avoid hysteresis, creep, and temperature effects, the piezoelectric slit can be equipped with a strain gauge measurement system. The positioning accuracy of the piezo slit with an integrated measurement system is typically 0.1% or better. Piezo slit elements are also available with steel slit edges. Almost all piezo slit systems PZS are available in UHV compatible versions and with different body and slit edge materials (INVAR).

More information about slit edges: types of mounting slit edges

+1 (508) 634-6688U.S. Office

+49 (3641)-6688 0German Office

Please contact our technical staff for further assistance. Together with you we will find a solution for your needs.

e-mail address: info@piezojena.com

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