Piezo Shutters/Piezo Slit Systems

Eigenschaften  Piezo Slit System Series Characteristics:

  • Symmetrical motion of two slit edges
  • Driven by only one piezo actuator
  • Opening up to 1500 µm (1.5 mm)
  • Nanometer precise resolution
  • Vacuum compatible version
  • Optional measurement system

Beam-Collimation / Beam Shaping


  Piezo Slit System Series Applications:

  • Optics
  • Spectroscopy
  • Vacuum Systems
  • Optical Switches
  • Shutters and Scanners

Overview Piezo Shutter/Piezo Slit Systems Series

PZS 1

PZS 1 (230 µm) - Piezo Slit System

  • Opening up to 230 µm
  • Nanometer resolution
  • Vacuum compatible version
  • Measurement system available

PZS 3

PZS 3 (1500 µm Slit) - Piezo Slit System

  • Opening up to 1500 µm (1.5 mm)
  • Nanometer resolution
  • Vacuum compatible version
  • Measurement system available

PZS 2

PZS 2 (60 µm Slit) - Piezo Slit System

  • Opening up to 60 µm
  • Precise resolution in nanometer range
  • Vacuum compatible version
  • Measurement system available

PZS 4

PZS 4 (300 µm Slit) - Precise Slit System

  • Nanometer resolution
  • Opening up to 300 µm
  • Vacuum compatible version
  • Measurement system available

Summary

Two slit edges are driven by only one piezoelectric actuator. Solid state flexure hinges with a parallelogram design were used to construct the piezo slit systems in order to ensure the synchronization of the slit edges with respect to the center line. To avoid hysteresis, creep, and temperature effects, the piezoelectric slit can be equipped with a strain gauge measurement system. The positioning accuracy of the piezo slit with an integrated measurement system is typically 0.1% or better. Piezo slit elements are also available with steel slit edges. Almost all piezo slit systems PZS are available in UHV compatible versions and with different body and slit edge materials (INVAR).

More information about slit edges: types of mounting slit edges

+1 (508) 634-6688U.S. Office

+49 (3641)-6688 0German Office

Please contact our technical staff for further assistance. Together with you we will find a solution for your needs.

e-mail address: info@piezojena.com

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