High Load Piezo Positioner Series NanoX 200

nanoX 200

nanoX 200 SG


  • Linear piezo motion up to 240 µm
  • Excellent guidance accuracy
  • 10kg load capability
  • 0.4 nm step resolution
  • 400 Hz resonant frequency @ 100g load

The high load piezo positioner nanoX®200 is a development within our ultra fast and high load capability nanoX® line. It provides a positioning and scanning range of up to 240 micrometer. The centrally located free aperture allows laser optical applications through the stage. This is also possible, when stacking them in an XY configuration. Due to FEA-optimization, the nanoX®200 provides the highest dynamical performance and excellent guiding accuracy. This is accomplished even with high mass loads in a very compact package. The nanoX® series is made for nanopositioning tasks in the field of semiconductor, laser & optics and test & measurement.

Our piezo stage optimization also incorporates excellent temperature compensation properties for the trajectory of the nanopositioning stage. The sophisticated monolithic guidance design of the solid flexure hinges means the trajectory is free of mechanical play and friction - a feature of all piezosystem piezo stages and nanopositioners.

Please note: Based on solid-state phenomena, piezo actuators and piezo ceramics generate pressure forces to affect the leverage geared motion. The PZT ceramic's extension is nearly linear to the applied electric field, but hysteresis and creep still exist. Piezo electrical geared stages and positioners are neither affected by nor produce magnetic fields. In cryogenic environments piezo actuators function down to almost zero Kelvin. This low temperature is associated with linear decreasing extension behavior. In vacuum conditions, piezo actuators and PZT ceramics can be used at pressures below 10 Pa.
Because of the greatly reduced dielectric breakdown strength of air, they should not be operated in pressures ranging from 10 Pa up to 10 kPa. To avoid creep and hysteresis, the piezo nanopositioner nanoX® 200SG / 200CAP is equipped with a high resolution measurement sensor.
In combination with the piezo controller, high stability, linearity, repeatability and accuracy are achieved during closed loop operation. 
The compact piezo stage design and the raster pin and drill holes for mounting allow an easy integration of the nanopositioning stages nano®X into your existing assembly.
Vacuum and cryogenic versions are available on demand, as well as body material variations of invar, superinvar, aluminum, or titanium.

Recommended Piezo Controller
Based on the bi-directional actuating manner of the nanoX series the required piezo controller units needs to support the nanoX principle. The digital piezo controller series d - Drive are basically suitable for all piezo actuators. The following piezo controller units are recommended: 

Analog: Controller Series ENV 300 nanoX and ENV 800nanoX
Analog OEM: Controller Series 30V300 nanoX
Digital: Digital Controller Series d-Drive

If you wish to receive further information on these products, please contact us under info(at)piezojena.com or use our contact form!

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Please contact our technical staff for further assistance. Together with you we will find a solution for your needs.

e-mail address: info@piezojena.com

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