XYHigh Speed Positioner Series nanoSXY 120
XYHigh Speed Positioner
- Linear motion up to 120 µm in XY
- 12.5 mm free clearance aperture
- Excellent guidance accuracy
- 10 N stiffness in z-axis
- 0.25 nm resolution
The newly designed stages of the nanoSXY series combine the high accuracy and the high speed of a piezo positioning system with a special actuating design for long travel motion. Furthermore, the stages offer a compact design with a height of only 20 mm, outside dimensions of only 60 x 60 mm, and a free center space of 12.5 mm!
The ultra flat design of the stage and the ease with which you can combine the stage to an xy scanning system make the system especially useful for a wide variety of applications.
Based on the unique piezojena bi-directional actuating nanoX design, this series is designed to move high load masses with a resolution of 0.25 nm. The nanoX design also guarantees excellent guidance accuracy without parasitic motion and improves the settling time in an active manner.
The stages can be equipped with a high resolution feedback system for closed loop control.
Fields of application include high resolution metrology, x and xy scanning, and dynamic positioning. The stages are available in cryogenic and vacuum versions as well.
Recommended Piezo Controller
Based on the bi-directional actuating manner of the nanoX series the required piezo controller units needs to support the nanoX principle. The following piezo controller units are recommended:
Analog: Controller Series ENV 300 nanoX and ENV 800nanoX
Analog OEM: Controller Series 30V300 nanoX
Digital: Digital Controller Series d-Drive