High Performance Systems for Nanopositioning – NanoX® Technology by piezosystem jena

Characteristics NanoX® Series Characteristics:

  Motion up to 900 µm
  Aperture for beam guidance
 High stiffness
Highly parallel guiding
 msec Rise Time
 sub-nm Resolution

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NanoSXY 400 CAP

NanoSXY 400 CAP

Animation: NanoX 400 with 5 kg load

Animation: NanoX 400 with 5 kg load


Product overview – series using NanoX® technology

NanoX 200

 

NanoX 200 / 200 SG / 200 CAP 

  • Motion range: up to 240 µm x-axis
  • Max. load: 10 kg
  • fres = 400 Hz @ 0.1 kg load 
  • with optional integrated positioning sensor (version SG and CAP)

NanoX 400

 

NanoX 400 / 400 SG / 400 CAP

  • Motion range: up to 480 µm in x-axis
  • Max. load: 5 kg
  • fres = 250 Hz @ 0.1 kg load 
  • with optional integrated positioning sensor (version SG and CAP)

NanoSX 400

 

NanoSX 400 / NanoSX 400 CAP

  • Motion range: up to 450 µm x-axis; flat design
  • Max. load: 10 kg
  • fres = 280 Hz @ 0.1 kg load 
  • with optional integrated positioning sensor (version CAP)

NanoSX 800

 

NanoSX 800 / NanoSX 800 CAP

  • Motion range: up to 900 µm in x-axis
  • Max. load: 5 kg
  • fres = 200 Hz @ 0.1 kg load 
  • with optional integrated positioning sensor (version CAP)

NanoSXY 120

 

NanoSXY 120 / NanoSXY 120 CAP

  • Motion range: up to 120 µm; xy-axes
  • Max. load: 5 kg
  • fres = 280 Hz @ 0.1 kg load 
  • with optional integrated positioning sensor (version CAP)

NanoSXY 400

 

NanoSXY 400 / NanoSXY 400 CAP

  • Motion range: up to 450 µm; xy-axes
  • Max. load: 5 kg
  • fres = 200 Hz @ 0.1 kg load 
  • with optional integrated positioning sensor (version CAP)

NanoX 240

 

NanoX 240 SG 45°

  • Motion range: up to 240 µm in x-axis
  • Beam deflection 90°
  • Application: cylinder head inspection system

NanoX® technology explained

Conventional piezo based nanopositioning systems use one stack type actuator (piezo actuator) for the motion of an axis. This ceramic stack is mounted between solid flexure joints to translate the forces generated by the stack. If these forces are higher than the internal preload, there is a risk of damaging the stack type actuator (piezo stack). 

The NanoX® design by piezosystem jena intelligently solves this problem:

The motion along one axis is achieved by using two stacks. While one piezo actuator moves in a certain direction, the other one is going the opposite way and back to its original position. The result is a higher stiffness of the whole nanopositioner (piezo stage). A nanopositioning system designed this way can bear higher forces and stacks are less likely to break.

piezosystem jena is offering a variety of stages using the NanoX® construction method. There are X and XY nanopositioning systems with up to 1.1 N/µm stiffness and up to 900 µm motion range. The NanoX® stages are ideal for high speed laser scanning, vibration control, active damping and other applications that are in need of highly dynamic motion.

The series with NanoX® technology, the NanoX high performance nanopositioners (piezo positioners), is well suited for the highest level in precision for nanopositioning and micropositioning tasks. The piezo stages are ideally suited for high load application. The high performance nanopositioner NanoX 400 moves a load up to 10 kg still under dynamic conditions. These actuators are using a piezo stack technology which is called "bidirectional active manner". Means, two separate controlled piezo stack type actuators are used in every single nanopositioner. If the first piezo actuator is charged by a voltage signal, the second piezo actuator of the nanopositioner (piezo positioner) is discharged. By using this unique technology the high performance nanopositioner (piezo positioner) generates setting and resetting forces. Thus enables the nanostage (piezo stages) to carry high loads also under dynamic conditions.

The NanoSXY series extends the NanoX® Productline with XY nanopositioners.

The NanoX series nanopositioner (piezo positioner) is available in the standard NanoX design and in the slim casing NanoSX version. Furthermore, the scanning stages of the nanopositioner from the NanoSX series can be mounted together with other NanoSX stages (stack on top of each other) to get a long travel range nano motion system which easily can offer a travel range up to 1.6 mm; without compromising the accuracy in positioning of few nanometer (nanopositioning).

Read more under piezopedia.

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Please contact our technical staff for further assistance. Together with you we will find a solution for your needs.

e-mail address: info@piezojena.com

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