Characteristics:

• ±7.5 mrad, ±15 mrad tilting angle resp.
• High step resolution (0.03 µrad)
• Excellent guidance accuracy
• ± tilting
• 1" mirror mounting area

Applications:

• Precision beam alignment
• Optics
• Laser technology
• Lithography
• Metrology
• Printing industry

The piezo tip/tilting systems PSH 15/1 and PSH 30/1 of the PSH series have been developed for fast and precise positioning of optical mirrors.

The FEM-calculated systems have been especially developed for 1" components.

The piezo tip/tilting systems are based on Piezosystem Jena's approved nanoX® design. This sophisticated gear design of the nanoSX and nanoX® series stands out with its bi-directional actuation and features an active push/pull-force. Basic features of these high performance piezo actuators are very high stiffness and resonance frequency. These features give the systems the capability to move heavy loads in a highly dynamic manner.

The bi-directional gear design makes the systems very robust and non-sensitive against external forces. The components which are to be moved can be glued directly onto the top plate and can be mounted using an adapter plate respectively.