Objective Positioner/Piezo Phase Shifter for Interferometry - MIPOS 16
- 16 µm adjustment range (open loop)
- large inside space available
- for 4" and 6"objectives
- high stiffness for lowest settling time
- typical step resolution 0.04 nm
- additional load up to 3 kg
- mounting orientation either horizontal or vertical
The nanopositioner and scanner MIPOS 16–158 is specifically designed for high precision positioning of optical systems with an accuracy in the sub-nanometer range. The high resolution and fast response time of the nanopositioner and scanner MIPOS 16-158 offer new possibilities especially for white light interferometers. Based on its unique design with a 104 mm aperture and a stage height of 42 mm, the MIPOS 16-158 offers technical specifications matching the requirements of white light interferometry. In the field of 3D surface measurement, white light interferometry has become one of the most effective methods. Piezoelectric actuators are able to significantly improve accuracy and speed due to their virtually unlimited resolution and fast response time. The nanopositioner and scanner MIPOS 16-158 can achieve a focus range up to 16µm and single step resolution of less than 0.1 nm, while operating in a voltage range between – 20 and 130 V. The MIPOS 16-158 is made for integration into metrology set-ups and devices. The robust drive is equipped with a high resolution piezo based actuating system. The internal mechanical preload design enables the MIPOS to operate in high dynamic environments while settling time is reduced down to microseconds.
Specials: A key feature is the high load capability of 3kg (6pounds). Optical setups and components can be moved either horizontally or vertically without affecting accuracy and speed.
Interfaces: The MIPOS 16-158 can be easily controlled by an analog low voltage signal. Therefore, piezosystem jena provides the nano Box USB – an ultra-compact single channel controller with USB 2.0 interface.