Nanopositioning Products: Piezo Actuators & Nano Stages

Equipment that utilizes the piezoelectric effect of PZT-based ceramic elements can achieve nanopositioning with practically unlimited resolution. piezosystem jena is one of the world’s leading companies in this technology. A controller sends analog signals to apply an electric field of certain voltage to the ceramic. The result is a change in length of the bi-polar elements which depends upon the signal strength. piezosystem jena makes use of this effect to design positioning equipment with exceptionally high resolution. The increase in the length of the PZT is quite small, therefore piezosystem jena employs a sophisticated flexure hinge design to increase the motion up to the mm range.

The unique piezo-based nanopositioning stages and piezo actuators of piezosystem jena guarantee the highest resolution in the sub-nm range, even when the total travel range is in mm. We use FEA tools to develop positioning elements with extremely high stiffness. This is the key to enabling piezo actuators and positioning stages to work at high speeds, as well as under high pressure.

Overview product range of our piezo actuators

Stack Actuator Without Casing
Piezo Actuators With Casing
Ring Type Piezo Actuators
1-Axis – PU Piezo Stages
X-Axis – PX Piezo Stages
Z-Axis – PZ Piezo Stages
High Load Piezo Stages – nanoX
XY-Axis – PXY Piezo Stages
5-Axis – PENTOR
Piezo Rotary Stage – ROTOR
Lens/Objective Positioner – MIPOS
Mirror Tip/Tilt-Platforms – PSH
Micrometer Screw Drive – MICI
Slit/Shutter Actuator – PZS
Piezo Grippers – GRIPPY
Fiber Positioning 2 times 3D – FAPOS

Our actuators are guaranteed to have a long lifetime, even under high dynamic applications, thanks to the protective flexible multilayer ceramic insulation. More than 24 years of experience using actuators with this special protective insulation make our elements the clear choice in high precision nanopositioning equipment.

Thanks to their unique characteristics in terms of dynamics, force and resolution, piezo-based positioning systems are ideal for many different applications:

  • Valves
  • Laser collimators
  • Micro- and nanopositionig
  • Laser scanning
  • Mirror shifting
  • Fiber alignment
  • Metrology
  • Microlens positioning
  • Screening
  • Microinjection, Patch Clamp
  • Wafer adjustment
  • Semiconductor
  • Beamssteering
  • Material Sciences
  • Lasercoupling
  • Detection

Contact us now for more information.

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Consult our Engineers

Explanations actuator characteristics
Questions about our piezo actuators

For more information on our products, please contact us via info(at), use the contact form or call +49 3641 66880.

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+1 (508) 634-6688U.S. Office

+49 (3641)-6688 0German Office

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