NEW TRITOR 110
- 3D nano-positioning stage
- Compact design with integrated feedback sensors available
- Flexure-hinge design without mechanical play
- Motion range up to 110 µm in open-loop
- Motion range up to 90 µm in closed-loop
TRITOR 110 – Product Description
The TRITOR 110 SG provides parallel X, Y and Z motion with an open-loop range of 110 µm in X/Y (105 µm in Z) and a 90 µm calibrated closed-loop range. Integrated strain gauge (SG) sensors deliver 0.2 nm resolution and 5 nm repeatability. Combining high stiffness (1 N/µm) with zero-friction flexure guiding, the TRITOR 110 SG is an ideal solution for high-precision fiber alignment, laser applications, and micro-positioning tasks.
Dynamic scan applications are a primary utilization for the TRITOR 110 SG. Simultaneous multi-axis motion, push forces up to 100 N, and high resonant frequencies up to 450 Hz offer large degrees of freedom and strong dynamic stability. All piezo stages can be made with special materials for specialized applications such as vacuum or cryogenic environments.
Through-holes are used for attaching the positioning system, which is crucial for all dynamic applications. Furthermore, its robust design makes the stage highly resistant to parasitic loads and torques during installation, payload mounting, or integration into larger systems.
Technical Data
| UNIT | TRITOR 110 SG | |
|---|---|---|
| Part # | T-403-01D | |
| Axis | X, Y, Z | |
| Motion in Open-Loop (±10%)* (x/y/z)* | μm | 110/110/105 |
| Motion in Closed-Loop (±0.2%)* | μm | 90 |
| Capacitance (per axis) ±10%** | μF | 1.8 |
| Resolution*** | nm | 0.2 |
| Stiffness | N/μm | 1/1/1 |
