XYZ positioner

nano positioning with heavy weights

piezosystem jena developed a new XYZ stage for high precision positioning of extremely heavy weights. With loads of over 10 kg, this nano positioner operates with nanometer resolution. This element achieves a motion of up to 50 µm in the X and Y-axes and up to 450 µm in the Z-direction. The high-precision capacitive measurement system guarantees long term stable positioning fidelity, linearity, and repeatability. All of these are achieved free of drift and hysteresis. Due to the solid-state hinge design, the motion is without any mechanical play or friction. A special, mechanical FEM-optimized design provides the highest dynamic performance. Thus, even with a load of over 10 kg, the stage reaches a resonant frequency of over 180 Hz in X/Y and over 50 Hz in Z-direction. The stage is also available in versions for vacuum, cryogenic, and non-magnetic applications.