Three-dimensional positioning system TRITOR320 for high loads
The TRITOR320 offered by piezosystem jena is a special development for highly accurate positioning needs. The TRITOR320 is characterized by excellent dynamics, even under heavy loads of up to 200N and provides a stroke in open loop of 50/50/400 µm (x/y/z) and closed loop 40/40/320 µm (x/y/z).
Optionally, the element can be equipped with a free aperture of 150x150 mm. Different versions of the positioning system are available like non-magnetic and vacuum versions. Capacitive sensors are used for the closed loop version, which provide a high non-linearity, repeatability and resolution.
The performance of the TRITOR 320 can be attributed to its construction with flexure hinges that are completely free of friction.
The three-dimensional positioning system TRITOR 320 is ideally suited for applications in automation and semiconductors.
Otherwise you can contact our staff for further details.
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