Product Spotlight: The TRITOR® series by piezosystem jena

The piezo actuators of the TRITOR^® series for 3D nanopositioning is distinguished by a sleek, compact body design and a large aperture in the interior. This is ideal for a whole range of applications - such as for microscopy with lower light or inspection applications in the semiconductor industry. piezosystem jena was the first company ever to produce actuators of this kind and is still the technology leader in this field.

The TRITOR^® series features solid state hinges in parallelogram design, which parallel movements of the X, Y and Z axes are possible without mechanical play. The movement range of individual series elements is up to 400 µm. Each axis of a TRITOR^® is provided with a built-in bias that prevents overshoot at high accelerations. The piezo actuators achieve extremely precise resolutions at nanopositioning - up to 0.3 nm in open loop and up to 1 nm in closed loop operation on certain models. A built-in sensor also prevents drifting and hysteresis.

Our engineers have evaluated the requirements and needs in microscopy, the semiconductor industry and in materials testing carefully and developed the TRITOR^® series actuators as a family that meets these requirements better than any previously existing solution for nanopositioning.

Want to know more about the TRITOR^® series? Visit our product page for detailed specifications and graphics.

Or contact our sales and technical support for a comprehensive product tour and possible modifications.