Conventional piezo stages are usually designed in a way that the direction of motion of the piezo stacks is identical per axis. The forces generated by those stacks is then translated by solid state hinges. In dynamic operation however, this can cause the piezo stack to break if the generated pull forces exceed the internal preload. The motion of the actuator in the opposite direction of the stack motion is passive. A few years ago, piezosystem jena decided to tackle this challenge.

The result is the NanoX® design, a completely new way of constructing a piezo stage. Here, piezo stacks are controlled opposed to each other. One stack is expanding while the other is contracting. Through this method an active backwards motion is achieved meaning even the backwards motion uses an actively expanding stack. This method of construction has several benefits for operational use. Not only is the stiffness increased, compared to stages with similar strokes, the stage can bear higher loads and generate higher forces.

Today, piezosystem jena offers many different models of the NanoX®. With the NanoSXY stages, there are even multi-axes systems available.

Image: NanoX 200

NanoX characteristics overview:

• Stroke up to 900 µm
• Up to 1.1 N/µm stiffness
• Highly parallel motion
• Models with aperture available
• Low rise times
• Up to 10 Kg load
• Resonant frequency up to 400 Hz
• SG and CAP sensors available
• Custom and OEM models possible
• UHV and cryo version    

For more information on the NanoX series and possible controller options, please contact our technical sales team via info(at)piezojena.com or our contact form. You can also reach us by phone. Just call +49(0)364166880.