13.01.2012

Positioning resolution in the sub-nanometer range


study by piezosystem jena and the IOF

piezosystem jena has analyzed the exact positioning noise and the associated resolution of piezoelectric nano positioners in cooperation with the Fraunhofer Institute for Applied Optics and Precision Engineering IOF in Jena.
An advantage of piezoelectric drives is their almost unlimited resolution. In many cases the positioning resolution is an important selling point for choosing the right system, but it is not possible to determine the resolution using conventional measurement instruments. Specifications below one nanometer are often given, but these values have been determined on the basis of an analytical simplified equation and not actually measured.

In the up-to-date study, which has made use of an AFM microscope, the positioning resolution has been examined in detail: In order to measure the resolution directly, the positioning noise of a compact one-dimensional piezo actuator has been metrologically determined. This was done by operating the actuator with a standard amplifier (EVD 50) as well as with a noiseless source.

The measurement data verifies the validity of the analytical simplified equation about the determination of the positioning noise. Additionally, the strong dependence of the actuator's positioning resolution on the quality of the power supply is confirmed. In the course of the study the resolution of the PU 100 HL actuator has been measured using a noiseless power supply. The tests showed a resolution of 0.15 nm.

The results of the study have been published in the January 2009 edition of the magazine Photonik (German language).


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