new series flat piezo scanner with 400 µm travel range
piezosystem jena announced their new nano-positioning stages series, nanoSX, ultraflat scanning stage with long travel movment
July 11, 2005: new nano-positioning stages series nanoSX
- 10 times higher stiffness compared to common stages
- ultraflat (10 mm height only)
- 60x60 mm2 in length and width
- flexible assembling
- bi directional motion up to 800 µm in X or 400 µm in XY
- free opening of 12.5 mm
- extremely high guidance accuracy
- max load higher than 100 N in XYZ!
- response time in the µsec range