13.01.2012

new piezo translation stage of PXY series


2-axes translation stage with a large central aperture

The PXY 500 AP from piezosystem jena is a large clearance, 2-axes translation stage of the PXY series. The large central aperture of 100x100 mm was designed for the implementation of microscopes and exposure systems. At a height of only 15 mm and external dimensions of 185 x 185 mm, the motion is 700 ?m per axis in open loop. In closed loop operation, the system achieves a motion of 500 µm.

The PXY AP line has been developed for fast and precise nanopositioning of optical and mechanical components, particularly for use in the broad field of microscopy, as well as the semiconductor industry. For that reason, the stages are very flat and allow for a large range of movement with sub-nm steps. This design also offers a wide square clearance, in addition to outstanding robustness. This provides you with the ability to pick up centrically large objects as well as heavy loads.

The FEA-optimized parallel kinematics of the actuator guarantee leading edge guidance accuracy and minimal lateral and rotational movement. The bidirectional actuating adjustment also enables you to reach high stiffness: excellent for dynamic applications. Overshooting is actively minimized by the controllability of the set and reset forces – making these stages an excellent choice for scanning applications as well.

The digital amplifier/controller from piezosystem jena has additional features in-situ and dynamic set up of PID parameters, slew rate, and notch filter bandwidth. The mechanical resonance can be determined using the built-in wobble generator. The notch filter setup eliminates undesired frequencies from the output voltage, such as the stage’s resonant frequency. This way you can easily adjust the setup depending on the current load scenario and optimize the performance of the system.

Vacuum and cryogenic versions are available upon request, as well as body material variations of invar, superinvar, aluminum, or titanium. An optional external sensor preamplifier (version “extern” / “digital”) can eliminate cable length dependence.


NEW Product Catalog from piezosystem jena

  • Application examples of piezo positioners
  • Piezoelements with nanometer-precision
  • Piezocomposite- High-Load-Actuators
  • Motion Control elements
  • Piezoline: detailed description of piezo-technology
  • Extensive explanation of the technology of High-Load-Actuators

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+49 (3641)-6688 0German Office

Please contact our technical staff for further assistance. Together with you we will find a solution for your needs.

e-mail address: info@piezojena.com

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