13.01.2012
nanoSXY - extremely stiff piezo stage with sub-nm resolution
piezosystem jena presents a new high speed piezo stage, nanoSXY 400, with a 400 µm travel range, based on the unique nanoSX design. The stage has a high load capability ans a resolution in the sub-nm range.
- bi directional motion in XY up to 400 µm
- sub-nm resolution
- higher stiffness compared to common stages
- 60x60 mm in length and width
- free opening of 12.5 mm
- extremly high guidance accuracy
- response time in the µsec range
Product Catalog from piezosystem jena
- Application examples of piezo positioners
- Piezoelements with nanometer-precision
- Piezocomposite- High-Load-Actuators
- Motion Control elements
- Piezoline: detailed description of piezo-technology
- Extensive explanation of the technology of High-Load-Actuators