nanoSXY - extremely stiff piezo stage with sub-nm resolution
piezosystem jena presents a new high speed piezo stage, nanoSXY 400, with a 400 µm travel range, based on the unique nanoSX design. The stage has a high load capability ans a resolution in the sub-nm range.
- bi directional motion in XY up to 400 µm
- sub-nm resolution
- higher stiffness compared to common stages
- 60x60 mm in length and width
- free opening of 12.5 mm
- extremly high guidance accuracy
- response time in the µsec range