high capacity piezo actuator: PZ 10

piezosystem jena has, in close cooperation with a customer, designed a piezo actuator which shows outstanding features. The PZ 10 element provides a stroke of 10 µm in the z-direction without any stiction/friction and without mechanical play. This allows a resolution in the sub-nm range and increments of 0.02 nm. The PZ 10 system can take loads of up to an impressive 100 kg.
A sophisticated monolithic flexure hinge guidance design features extreme robustness against off-center loads - and still shows excellent guidance accuracy.
With this high-capacity piezo stage, piezosystem jena offers an element which is, with respect to the distinguished guidance accuracy and the outstanding robustness, ideally suited for use in industrial applications.