Accuracy improvement of linear measuring stages

A special actuator called "MICI", developed by piezosystem jena, improves the positioning accuracy of linear stages. This is a piezoelectric driven stage which allows you to adjust the micrometer screw of a measuring stage in a range of up to 180 µm. The MICI is mounted between the measuring stage and the micrometer drive by clamps. A pre-adjustment is done by the measuring screw and the final fine adjustment is made by the MICI. Therefore, an accuracy of better than 35 nm can be reached. An optional positioning sensor guarantees an extremely high positioning stability and a high reproduceability. The MICI piezoelectric actuator is controlled by a voltage signal like other piezo drives from piezosystem jena. A special design allows for easy modification which makes the MICI compatible for all common types of micrometer screws available from any supplier.