Compact Power. Unmatched Durability. Discover CuX Piezo Stack Actuators
The CuX series provides compact, high-efficiency multilayer piezo actuator stacks designed for demanding industrial and scientific applications. Engineered using advanced piezoceramic (PZT) materials, these stacks offer rapid response times, exceptional durability, and precise displacement across a wide range of voltages.
Key Features
- Higher Performance: With more optimized active areas, CuX stacks can achieve 20% greater strokes.
- Humidity Resistant and Cost-Effective: With copper-based design, CuX stacks are outstanding against humidity and better cost-effective solution.
- Higher Temperature Operation: Thanks to lead-free metal bond, CuX stacks are extremely durable at temperature range of 200°C without embrittlement.
- Longer Lifetime: CuX stacks have extended lifetime, tested up to 1 billion cycles with 83Hz and 170°C. Proven durability up to 95% humidity.
- Available in High Volume: CuX stacks are available in high-volume with short delivery times.

NEW Whitepaper:
CuX Stack Piezo Actuators (Comparison with N-Stack Actuators)
Choosing CuX means more than just advanced piezo performance—it’s a smart business decision. With extended lifetime and outstanding durability, CuX stacks reduce replacement intervals and maintenance costs, resulting in a significantly lower total cost of ownership. Their copper-based design shields you from raw material price swings, ensuring consistent, reliable budgeting.
Need parts fast? CuX stacks are volume-ready with short delivery times for standard configurations, supporting accelerated development and reduced time-to-market. Their scalable production capability makes them ideal for OEMs and high-volume applications.
Typical Applications
- Precision mechanics and automation for semiconductor manufacturing
CuX piezo stack actuators deliver up to 20% greater stroke and longer lifetime compared to conventional piezo stacks. Moreover, these stacks enable smaller assemblies for higher extension factor, which make them ideal for demanding semiconductor environments, such as wafer alignment, lithography and mask inspection processes. - High-end solutions for micro-dispensing valves
CuX stacks incorporate high-temperature stable bonding validated up to 200 °C and offer excellent resistance to humidity and aggressive media. CuX stacks ensure high repeatability and long-term reliability in micro-dosing and jetting applications, even under harsh process conditions. - Aerospace and optical systems
CuX stacks provide fast sub-millisecond response with higher stiffness, which is ideal for fine optical adjustments, active stabilization, and lightweight aerospace systems where reliability, compactness, and performance are highly critical. - Microfluidics and dosing control
High dynamic range, precise displacement control and low hysteresis enable accurate dosing of small volumes in analytical instruments and lab-on-chip platforms. CuX actuators can perform repeatable microfluidic control under fluctuating temperature and loads. - Active vibration and noise control
With their high force density and long cycle life, CuX piezo actuators are well-suited for real-time vibration damping in precision equipment and vehicles. Their rapid actuation and robust construction support consistent performance in dynamic and high-frequency environments.
Why CuX Outperforms Traditional Piezo Stacks
Optimized Active Area for Enhanced Performance and Longevity
Mechanical stress during operation is often concentrated in the inactive regions of a piezo actuator. These zones are prone to initiating cracks in the ceramic structure, especially as their size increases. CuX stacks significantly reduce this risk by minimizing inactive layer width to just 100 µm—a fourfold improvement over conventional designs (typically ∼400 µm). This refinement not only lowers internal stress but also extends actuator life, enables higher operating voltages (up to 180 V), and delivers approximately 20% greater stroke which peak their actuating performance.
Copper Inner Electrodes: Humidity-Resistant and Economically Efficient

Key Notes
Copper-based inner electrodes for:
- Avoiding Ag migration between the inner electrodes
- Tested up to 1 billion cycles of 83 Hz and 170°C
- Outstanding resistance against humidity
- Cost-saving in further moisture protection
Standard multilayer actuators often use silver-palladium alloys for internal electrodes, but silver is highly prone to migration under humid conditions and electric fields which leads to internal short circuits or failure. CuX piezo actuators avoid this issue by employing copper electrodes, which offer excellent resistance to ion migration and maintain electrical integrity even in harsh environments. Copper is not only mechanically stable, but also significantly more cost-stable compared to palladium. Hence, making CuX stacks a smart choice for both reliability and cost-efficiency.
Lead-Free High-Temperature Metal Bonding for Maximum Durability

The joints that connect external electrodes endure substantial mechanical and thermal stress during extended operation. Traditional lead-based solders often fail at elevated temperatures due to embrittlement. CuX stacks incorporate a lead-free, high-melting-point metallic bond that remains structurally sound and flexible under extreme thermal conditions. This advanced interconnection technology has been validated through endurance testing, maintaining full functionality after 2000 hours at 200 °C, whereas conventional solders typically fail after just 1500 hours at 180 °C. The result is superior thermal reliability without compromising environmental safety.
Comparison with N-Stacks
| Comparison | N-Stacks | CuX Stacks |
|---|---|---|
| Technology | PZT multilayer stack silver/palladium actuator without housing, no preload | Multilayer piezo actuator with copper inner electrodes |
| Maximum Stroke | Up to 41 µm (Series N 35/ S3.5) | Up to 55 µm (Series CuX-M) |
| Stiffness | Up to 20 N/µm (Series N 35/ S5) | Up to 45 N/µm (Series CuX-M) |
| Blocking Force | Up to 850 N (Series N 35/S5) | Up to 2600 N (Series CuX-L) |
| Capacitance | Up to 3.6 µF (Series N 35/S5) | Up to 6.2 µF (Series CuX-L) |
| Voltage Range | -20… 130 V | -10… 180 V |
| Lifetime Test | >750 million cycles tested at 20°C 50% RH | up to 1 billion cycles of 83 Hz and 170°C |
| Curie Temperature | >145°C | 340°C |
| Delivery time | Project-based, longer lead times possible | Very good – short delivery times with standard types |
Engineering Support & Integration
All CuX stacks are manufactured to tight mechanical and electrical tolerances and come with full dimensional drawings, electrical specs, and integration guidelines. piezosystem jena also offers:
- Piezos can be stacked to achieve custom lengths. Available with wires from piezosystem jena.
- Integration into mechanical subassemblies (e.g., preload frames and stands wiring)
- Co-development of system solutions with control electronics
- Plug’n’Play amplifiers NV200/1 and NV 200/2 available
Need design support? Our engineers help you integrate CuX stacks into your assembly — including preload mounts, stands, and electronic
Get in Touch
Interested in evaluating CuX stacks for your project?

