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Series PA, PAT and PAHL

PA, PAT & PAHL Actuators – Description

The PA, PA/T and PAHL series piezo actuators are all stack type actuators manufactured incorporating multilayer technology. They are internally pre-loaded with a mechanical spring, making them ideal for dynamic applications. The ability to generate a large force, and be subjected to high mass loading makes them particularly useful for machine tools and dynamic scanning systems. These actuators have a uniform diameter of either 14 or 20 mm depending on series. Strain gauge (SG) is used for closed-loop systems.

Piezo actuators should only be fastened with screws or clamps on the bottom plate of the actuator. During the installation and use, it is important not to subject the actuator tip to non-axial forces.

The actuator head is available in three versions: round head piece is standard, flat head option, and M3 thread on demand.

PA Series – Technical Data

(See Datasheet PDFs below this chart for the complete list of product variations)

4 Example ProductsUNITPA 8/14PA 120/14PA 8/14 SGPA 120/14 SG
Part #B-201-00B-214-00B-201-01B-214-01
Motion in Open-Loop (-10/+20%)*μm10140
Motion in Closed-Loop (±0.2%)*μm8112
Capacitance (±20%)**μF0.812.60.812.6
StiffnessN/μm856856
Resolution in Open-Loop***nm0.020.29
Resolution in Closed-Loop***nm0.12.8
Dimensions – Lengthmm2814528145
Diametermm14141414
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.

PA/T Series – Technical Data

(See Datasheet PDFs below this chart for the complete list of product variations)

4 Example ProductsUNITPA 35/T14PA 120/T14PA 35/T14 SGPA 120/T14 SG
Part #P-354-00P-360-00P-354-01P-360-01
Motion in Open-Loop (-10/+20%)*μm42125
Motion in Closed-Loop (±0.2%)*μm34100
Capacitance (±20%)**μF3.610.83.610.8
StiffnessN/μm207207
Resolution in Open-Loop***nm0.080.25
Resolution in Closed-Loop***nm0.71.0
Dimensions – Lengthmm5312553125
Diametermm14141414
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.

PAHL Series – Technical Data

(See Datasheet PDFs below this chart for the complete list of product variations)

4 Example ProductsUNITPAHL 18/20PAHL 200/20PAHL 18/20 SGPAHL 200/20 SG
Part #P-171-00P-180-00P-171-01P-180-01
Motion in Open-Loop (-10/+20%)*μm21200
Motion in Closed-Loop (±0.2%)*μm17160
Capacitance (±20%)**μF770770
StiffnessN/μm1651716517
Resolution in Open-Loop***nm0.040.4
Resolution in Closed-Loop***nm0.44.0
Dimensions – Lengthmm3619840198
Diametermm20202020
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.

Series P and PHL

Series P and PHL Actuators – Description

Series P and Series PHL piezo actuators are stack type actuators built in a multi-layer technique. PHL actuators are high-load. These P and PHL actuators both come without a pre-load, but they can still withstand a medium pressure force. PHL actuators are designed for high-load applications.

These piezo actuators are encased in a stainless steel housing.

P and PHL series actuators should be fastened with screws or clamps on the actuator’s bottom plate. These actuators are not designed for dynamic applications.

Technical Data

(See Datasheet PDFs below this chart for the complete list of all product variations)

4 Example ProductsUNITP 8/8P 80/10PHL 18/20PHL 100/20
Part #P-101-00P-117-00P-141-00P-145-00
Motion (-10%/+20%)*μm98220103
Capacitance (±20%)**μF0.187.2734
StiffnessN/μm221017535
Resolution***nm0.020.160.040.21
Dimensions – Lmm179136108
Diametermm8102020
*Typical value measured with a NV 40/3 amplifier. ** Typical value for small signal strength. **The resolution is only limited by the noise of the power amplifier.

Series N

Series N Piezo Actuators – Description

Series N piezo actuators are made for industrial applications. They consist of a large number of contacted ceramic discs. The electrodes are arranged on both sides of the ceramic discs. They are specially shielded by a flexible insulation material which guarantees the highest possible dynamic performance under the toughest requirements. Based on their design, they are well suited for easy integration into specific customer systems. Special designs are made with a centrically drilled hole.

The special flexible polymer insulation guarantees the highest performance for long term applications. It gives the PZT piezo actuators proven protection against various and harsh environments. The advantage of a flexible insulation versus brittle ceramic insulation is a longer lifetime. Results show that piezo electric actuators have worked, and continue to work, under extreme conditions for over 20 years. The insulation is also suitable for use in cryogenic and vacuum environments. Additional thermal shrink tube insulation protects the cable connection point on the ceramic.

It is important not to subject the actuator tip to non-axial forces during a manufacturing process and use. The PZT multilayer stacks are not preloaded. An external preload is applied when used in dynamic applications or in applications with high acceleration forces.

The standard cable length is 100 mm. As an option, flat tungsten carbide or ball tip end plates are available. Please note that when using these actuators under cryogenic conditions (4 K), only 10% of the standard motion is available.

The Series N piezo actuators have been successfully working for more than 20 years in a vast number of applications in the fields of nano-metrology, semiconductor, material sciences and scanning applications.

Technical Data

(See Datasheet PDFs below this chart for the complete list of product variations)

4 Example ProductsUNITN 2/5N 25/S3.5N 100/S5N 120/S10
Part #P-211-00P-217-40P-207-40P-237-40
Motion (±10%)*μm230103123
Capacitance (±20%)**μF0.11.29.036.4
StiffnessN/μm25014828
Resolution***nm0.0040.060.20.25
Dimensions – L x W x HmmL = 527 x 5.5 x 7.5108 x 7 x 9108 x 12 x 14
Diametermm5
*Typical value measured with a NV 40/3 amplifier. ** Typical value for small signal strength. **The resolution is only limited by the noise of the power amplifier.