The TRITOR 110 SG provides parallel X, Y and Z motion with an open-loop range of 110 µm in X/Y (105 µm in Z) and a 90 µm calibrated closed-loop range. Integrated strain gauge (SG) sensors deliver 0.2 nm resolution and 5 nm repeatability. Combining high stiffness (1 N/µm) with zero-friction flexure guiding, the TRITOR 110 SG is an ideal solution for high-precision fiber alignment, laser applications, and micro-positioning tasks.
Dynamic scan applications are a primary utilization for the TRITOR 110 SG. Simultaneous multi-axis motion, push forces up to 100 N, and high resonant frequencies up to 450 Hz offer large degrees of freedom and strong dynamic stability. All piezo stages can be made with special materials for specialized applications such as vacuum or cryogenic environments.
Through-holes are used for attaching the positioning system, which is crucial for all dynamic applications. Furthermore, its robust design makes the stage highly resistant to parasitic loads and torques during installation, payload mounting, or integration into larger systems.
Technical Data
UNIT
TRITOR 110 SG
Part #
T-403-01D
Axis
X, Y, Z
Motion in Open-Loop (±10%)* (x/y/z)*
μm
110/110/105
Motion in Closed-Loop (±0.2%)*
μm
90
Capacitance (per axis) ±10%**
μF
1.8
Resolution***
nm
0.2
Stiffness
N/μm
1/1/1
*Typical value measured with a NV 40/3 CLE amplifier. **Typical value for small electrical field strength. ***The resolution is only limited by the noise of the power amplifier and metrology.
The capability to move loads up to 20 kg make the TRITOR 320 one of the most robust piezo driven 3D positioning stages available on the market. The stage can be equipped with an integrated feedback sensors for closed-loop control. The unique design of the flexure-hinges allow for excellent usability with zero friction.
High stiffness, in combination with excellent straightness of motion, makes the TRITOR 320 ideal for high precision positioning in the nanometer range of heavy objects such as wafer chucks, bonding tools, and pick & place platforms.
Piezoelectrical actuators can act much faster, and with a higher accuracy to a signal change, than any motorized drive available. The resolutions of piezoelectrical actuators are only limited by the signal noise of the control system. Therefore, these piezo solutions are an excellent choice for positioning applications in fiber alignment, optics, wafer handling, medical equipment, etc. Each axis can be controlled separately in closed loop mode. An integrated sensor system is an available option that guarantees accuracy in the nanometer range.
Dynamic scan applications are a typical utilization of TRITOR stages. The simultaneous motion, available in X, Y and Z directions, offers a large degree of freedom. All stages of the TRITOR series can be made with special materials for unique vacuum or cryogenic applications.
Technical Data
UNIT
TRITOR 320
TRITOR 320 CAP
Part #
T-406-70
T-406-76
Axes
X, Y, Z
X, Y, Z
Motion in Open-Loop (±10%)*
μm
50/50/400
50/50/400
Motion in Closed-Loop*
μm
–
40/40/320
Resolution** (Open-Loop Mode)
nm
0.1/0.1/0.8
0.1/0.1/0.8
Resolution** (Closed-Loop Mode)
nm
–
1
Dimensions (L x W x H)
mm
320 x 320 x 55
320 x 320 x 55
Weight
g
8000
8000
*Typical value measured with a d-Drive amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.
Optical stages often require an open aperture for passing light through. The PENTOR translation and tilting system was developed with a 17 mm free center hole for such applications. It offers motion in X, Y and Z directions of 100 µm, and a tilt of ±2 mrad on two orthogonal axes.
Flexure hinges for the three translation axes guarantee the highest degree of parallelism over the travel range of this stage. Each axis has a integrated mechanical preload, making the 5-axis piezo positioner PENTOR, very well suited for dynamic applications. The tilting is designed for plus-minus tilting.
The construction is temperature compensated so that changes in the surrounding temperature do not affect the tilting angle. The mirror mounts are preloaded, and are characterized by high stiffness and resonant frequency – and dynamic operation is possible.
The primary components constructed with solid state flexure hinges are made from stainless steel. The bottom and top plates are made from black anodized aluminum.
As an option, the 5-axis PENTOR can be outfitted with an integrated strain gauge measurement system.
The TRITOR 400 has a parallel XYZ motion range of 400 µm per axis. The unique cube design of the flexure guiding system allows for excellent usability with zero friction. With a combination of high stiffness and excellent straightness of motion, the three-axis piezo positioner TRITOR 400 is an ideal solution for high precision positioning in the nanometer range for fiber alignment, laser-use, and many other micro-positioning tasks.
Dynamic scan applications are a typical utilization for the TRITOR 400. The simultaneous motion available in X,Y and Z directions, offers large degrees of freedom during use. All piezo stages can be made with special materials for specialized applications such as vacuum or cryogenic applications.
Through-holes are used for attaching the positioning system which is important for all dynamic applications. On the top plate there are pin holes and threaded holes for the mounting of external components. The three dimensional piezo elements are built with reliable piezo-stack actuators. The TRITOR 400 includes flexible insulation that is well suited for high dynamic applications.
Technical Data
UNIT
TRITOR 400
TRITOR 400 SG
TRITOR 400 CAP
Part #
T-406-00
T-406-01
T-406-06
Axis
X, Y, Z
X, Y, Z
X, Y, Z
Motion in Open-Loop (±10%)*
μm
400
400
400
Motion in Closed-Loop (±0.2%)*
μm
–
320
320
Resolution in Open-Loop**
nm
0.8
0.8
0.8
Resolution in Closed-Loop**
nm
–
35
1
Dimensions (L x W x H)
mm
116 x 106 x 40
116.6 x 106.5 x 40
116 x 106 x 40
Weight
g
1050
1050
1100
*Typical value measured with a NV 40/3 CLE amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.
The TRITOR 101 and the TRITOR 102 are extremely compact solutions that offer motion up to 100 μm in X, Y and Z directions. The unique cube-like mechanical design allows motion without play. They are well suited for many applications from optical research to incorporation into OEM systems.
Probe alignment with microscopes usually requires an open center area for the passage of light. The 3D piezo stage models TRITOR 101 and 102 with their central apertures of 30 mm and 40 mm were developed considering such applications. High stiffness, in combination with excellent straightness of motion, makes the TRITOR series ideal for high precision in the nanometer range for optics, laser–use, and any other type of high resolution positioning applications.
Technical Data
UNIT
TRITOR 101
TRITOR 101 SG
TRITOR 102
TRITOR 102 SG
Part #
T-404-00
T-404-01
T-405-00
T-405-01
Axis
X, Y, Z
X, Y, Z
X, Y, Z
X, Y, Z
Motion in Open-Loop (±10%)*
μm
100
100
100
100
Motion in Closed-Loop*
μm
–
80
–
80
Resolution**
nm
0.2
2
0.2
2
Dimensions (L x W x H)
mm
68 x 68 x 30
68 x 68 x 30
80 x 80 x 30
80 x 80 x 30
Weight
g
480
570
520
610
*Typical value measured with a NV 40/3 CLE amplifier. **The resolution is only limited by the noise of the power amplifier and metrology.
