Piezo Systems Made For Interferometry

The applications of FIZEAU interferometry and White light interferometry can be realized with our products.

In the field of 3D surface measurement, white light interferometry has become one of the most effective methods. Piezoelectric actuators are able to significantly improve accuracy and speed due to their virtually unlimited resolution and fast response time.

piezosystem jena presents the new MIPOS 16-158 - specifically designed for high precision positioning of optical systems with an accuracy in the sub-nanometer range. The high resolution and fast response time of the MIPOS 16 offer new possibilities for interferometry.
Based on its unique design with a 104 mm aperture and a stage height of 42 mm, the MIPOS 16-158 offers technical specifications matching the requirements of white light interferometry.
The MIPOS 16-158 can achieve a focus range up to 16µm and single step resolution of less than 0.1nm, while operating in a voltage range between - 20 and 130 V. The MIPOS 16-158 is made for integration into metrology set-ups and devices.

Special MIPOS system 16-158
MIPOS 16-158

MIPOS System For Metrology

MIPOS System For Metrology

The robust drive is equipped with a high resolution piezo based actuating system. The internal mechanical pre-load design enables the MIPOS to operate in high dynamic environments while settling time is reduced down to microseconds.
A further key feature is the high load capability of 3kg (6pounds). Optical setups and components can be moved horizontally and vertically without affecting accuracy and speed.

The MIPOS 16-158 can be easily controlled by an analog low voltage signal. Therefore, piezosystem jena provides a wide range of low signal noise piezo amplifier.

Design Sketch

 

 

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