Equipment for
Nanopositioning

micrometer screw drive

MICI 80 / 180 / 200 and MICI 140

characterics:

  • motion up to 250µm
  • high resonant frequency
  • high precision adjustment of linear positioner
  • motion without mechanical play 
  • precise adjustment of heavy loads
  • MICI 180 compatible with series SM13 micrometer
    drives from "NEWPORT"
  • MICI 80 and 200 are compatible with series 152 micrometer drives from "Mitutoyo"
  • MICI 140 compatible with series G micrometer drives from "Qioptiq Photonics"


applications:

  • improvement of resolution of linear stages
  • quality control
  • automation
  • fine adjustment of optical components
  • microassembly
micrometer screw drive

These elements were originally developed for quality control in the optical industry and they consist of a piezoelectrical actuator in combination with a micrometer screw drive.

The user can first adjust the position of the actuator, and then fine tune this position with the aid of the piezostage. The resolution is in the nm and sub-nm range.

Because of the very robust construction of the element, high load masses can be lifted.

The customer has a choice between different models, with different travel ranges and load capabilities.

description

travel range

compatible with

MICI 80

80 µm

series152 from "Mitutoyo"

MICI 180

180 µm

series SM13 from "NEWPORT"

MICI 200

250 µm

series 152 from "Mitutoyo"

MICI 140

140 µm

series G from "Qioptiq Photonics"


The mechanical interface for the required micrometer drive can be adjusted easily.
Please ask for more information: sales(at)piezojena.com.

micrometer screw drive

2pcs. MICI mounted (incl. micrometer screw) on XY-Scan-Stage from SEMPREX


Please contact us for more information or adjustments:

piezosystem jena GmbH
Jena, Germany

phone: (+49) 3641 66 88-0
e-mail:
info(at)piezojena.com

piezosystem jena, Inc.
Hopedale, USA

phone: 508 634 66 88
e-mail:
usa(at)piezojena.com

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