piezo positioning
piezo positioning .- the technology of piezo positioning equipment shows some important advantages in comparison to electrical driven actuators:
- piezo positioning can offer resolution within the nanometer range
- every single changing of the applied signal causes an electrical field changing. This is the reason for short reaction time and fastest piezo positioning (e.g. piezo scanner)
- piezopositioning in combination with closed loop feed back control and offers high repeatability and long terms stability with sub nanometer accuracy.
- without mechanical play by using flexure hinges gudied systems for the piezo positioning system
- without wear, because the piezo actuator don't have moved parts. Piezo elements can be used under vacuum and also cryogenic conditions after preparation.
