Equipment for

Interferometer & Vibrometer Offered by SIOS

Piezosystem Jena is pleased to announce the immediate availability of SIOS interferometric measurement systems for calibration and control of nanoscale movements.

The new metrology product line will include single double and triple beam interferometers for:

  • Length measurements down to 0.02 nm (20 picometers) and
  • Angular measurements down to 0.002 arcsec.

A vibrometer is also available for vibrational analysis. Applications include semiconductor analysis, microscopy, materials analysis and microstructure measurement.

Piezosystem Jena is the exclusive distributer for SIOS measurement systems in the US.

For further questions please contact us: usa(at)

SIOS Interferometer

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