Equipment for
Nanopositioning

Mirror positioning systems PSH x/2

characteristics:

  • plus-minus tilting in two dimensions
  • tilt up to +/- 4 mrad
  • high resolution
  • high resonant frequency
  • central pivot point
  • integrated sensor system upon request
  • appropriate for vacuum applications
  • OEM-version available


application examples:

  • scanner
  • cameras/optical systems
  • mirror tilting
  • image stabilization
  • laser beam stabilization


The mirror positioning systems, PSH 10/2 and PSH 5/2, consist of 4 piezoelectric actuators (always 2 stacks for one axis, controlled in conjunction with each other). These actuators provide tilt to the top plate on 2 rectangular axes. Their construction is temperature compensated so that changes of the surrounding temperature do not affect the tilting angle. The tilting positioning stage is designed for "plus-minus tilting". Mirror mounts are preloaded, thus they are well suited for dynamic applications.

The high resonant frequency of the mirror positioning systems also allow for excellent dynamic operation. An integrated strain gauge measurement system is available for closed loop application.

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